Vacuum Pump, Leybold TurboVac 50
The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-1 Torr). Pumping speeds for air vary from 35 l/s to 2,400 l/s. Because of its compact design, the most reliable ceramic ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultrahigh vacuum areas of application.
Typical Applications
Leak detectors
Mass spectrometers
Electron beam microscopy
TV tube manufacturing
Load locks and transfer chambers
High vacuum chambers
Technical Features
Small footprint
Installation in any orientation
Cooling by convection is sufficient for most applications
Air and water cooling can be added easily
Oil-free pump for generating clean high and ultrahigh vacuum conditions
Advantages to the User
Space-saving
Easy to integrate into complex vacuum systems
Low operating costs
Highly reliable operation also in processes loaded with particles